Title :
Micro-Type Powder-Sputtered Thin Film Gas Sensors with Long-Term Stability
Author :
Lu, Honglang ; Yang, Xueyan ; Wu, Changzhong ; Li, Jianming ; Qiu, Nanyuan
Author_Institution :
Sch. of Mech. Eng., Jinan Univ.
Abstract :
Powder sputtering technique which was developed by means of opposite sputtering has special advantages such as simple doping, easy target preparation, and especially the excellent doping stability in the thin films. Thus more widely investigation on the powder-sputtered metal oxide gas sensing thin films has been executed. Based on these work, the main parameters of the micro-type powder-sputtered thin film gas sensors were designed and the sensors with good long-term stability were developed
Keywords :
MIS structures; gas sensors; powder technology; semiconductor doping; semiconductor thin films; sputtering; stability; doping stability; metal oxide gas sensing thin films; micro-type powder-sputtered thin film gas sensors; Gas detectors; Iron; Powders; Semiconductor device doping; Semiconductor thin films; Sputtering; Stability; Substrates; Testing; Thin film sensors; Doping stability; Gas sensors; Powder sputtering; Thin films;
Conference_Titel :
Mechatronics and Automation, Proceedings of the 2006 IEEE International Conference on
Conference_Location :
Luoyang, Henan
Print_ISBN :
1-4244-0465-7
Electronic_ISBN :
1-4244-0466-5
DOI :
10.1109/ICMA.2006.257619
