Title :
A MOS Image Sensor with Microlenses Built by Sub-Wavelength Patterning
Author :
Toshikiyo, Kimiaki ; Yogo, Takanori ; Ishii, Motonori ; Yamanaka, Kazuhiko ; Matsuno, Toshinobu ; Onozawa, Kazutoshi ; Yamaguchi, Takumi
Author_Institution :
Matsushita Electr. Ind., Kyoto
Abstract :
A MOS image sensor has digital-microlenses implemented by sub-wavelength patterning of concentric SiO2 ring walls. The sensitivity at the periphery of the imager is 3000e-/1x-s. In comparison, the sensitivity at the periphery of a conventional imager is 1300e/1x-s. Thus, extremely uniform brightness throughout the reproduced image is demonstrated even with an angle of incidence > 45deg.
Keywords :
MOS integrated circuits; image sensors; microlenses; silicon compounds; MOS image sensor; SiO2; digital-microlenses; ring walls; sub-wavelength patterning; Digital cameras; Image sensors; Lenses; Microoptics; Optical arrays; Optical refraction; Optical sensors; Pixel; Refractive index; Signal design;
Conference_Titel :
Solid-State Circuits Conference, 2007. ISSCC 2007. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0853-9
Electronic_ISBN :
0193-6530
DOI :
10.1109/ISSCC.2007.373520