Title :
High-Accuracy Measurements of the Spacing of Diffraction Gratfngs in the Range 0.28/spl mu/m -0.50 /spl mu/m Using Laser Interferometric Diffractometry
Author :
Korotkov, V.l. ; Podkin, S.A. ; Vitushkhin, A.L. ; Vitushkin, L.F.
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562304
