Title :
A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning
Author :
Tsuboi, O. ; Mi, X. ; Kouma, N. ; Okuda, H. ; Soneda, H. ; Ueda, S. ; Ikai, E.
Author_Institution :
Fujitsu Labs. Ltd., Akashi, Japan
Abstract :
This paper presents a new structure and driving method for a vertical comb-driven micromirror which enables full-time acceleration and mechanical 30-degree scanning with a 4-mm long mirror. Its optimal application is as a scanning mirror for laser beam printers, replacing polygon mirrors which have technical limits in relation to scanning speed.
Keywords :
laser printers; micromirrors; optical fabrication; optical scanners; 4 mm; full time acceleration scanning; high speed scanning; laser beam printers; mechanical scanning; polygon mirrors; scanning mirror; vertical comb driven micromirror; Acceleration; Electrodes; Electrostatic actuators; Laser applications; Mirrors; Optical losses; Printers; Teeth; Torque; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290524
