Title :
High fill-factor two-axis analog micromirror array for 1×N2 wavelength-selective switches
Author :
Tsai, Jui-che ; Huang, Sophia ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
We report on a two-axis analog micromirror array with high fill factor (96%) and large mechanical scan angles (±4.4° and ±3.4°). To our knowledge, this is the highest linear fill factor ever reported for two-axis analog micromirror arrays. A 1×14 wavelength-selective switch (WSS) was also demonstrated using the mirror array. This is the largest number of port count ever reported for WSS. The fiber-to-fiber insertion loss is 8.2 dB. Switching of <2 msec has been achieved.
Keywords :
micromirrors; microswitches; optical arrays; optical fibre losses; optical switches; 8.2 dB; fiber-fiber insertion loss; mechanical scan angles; microswitches; two axis analog micromirror arrays; wavelength selective switch; Electrodes; Insertion loss; Micromechanical devices; Micromirrors; Mirrors; Optical arrays; Optical crosstalk; Optical fiber polarization; Optical switches; Springs;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290532
