Title :
Monolithic integration of microfluidic channels and optical waveguides using a photodefinable epoxy
Author :
Ruano, J.M. ; Aguirregabiria, M. ; Tijero, M. ; Arroyo, M. ; Garcia, J. ; Berganzo, J. ; Aramburu, I. ; Blanco, F.J. ; Mayora, K.
Author_Institution :
MEMS-MST Dept., Ikerlan S. Koop, Arrasate, Spain
Abstract :
This work describes a novel use of a photodefinable epoxy to monolithically integrate low cost optical-microfluidic sensor devices. The chip consists of multimode waveguides, sealed microchannels and optical connectors on a silicon wafer. The process consists of (i) 4 successive photolithographic steps, (ii) a bonding process, (iii) and a final releasing step. The core of the waveguide is made of SU8 in a liquid aliphatic epoxy resin. Despite the dilution, the SU8:aliphatic epoxy is still able to be patterned by photolithography.
Keywords :
integrated circuit bonding; microfluidics; microsensors; monolithic integrated circuits; optical couplers; optical polymers; optical sensors; optical waveguides; photolithography; polymers; Si; bonding process; liquid aliphatic epoxy resin; microfluidic channels; monolithic integration; multimode optical waveguides; optical connectors; optical microfluidic sensor devices; photodefinable epoxy; photolithographic; silicon wafer; Connectors; Costs; Integrated optics; Microchannel; Microfluidics; Monolithic integrated circuits; Optical devices; Optical sensors; Optical waveguides; Sensor phenomena and characterization;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290537
