Title :
Ultraviolet light detection with silicon nanocrystals-embedded mesoporous silica sensing layer
Author :
Shieh, Jia-Min ; Lai, Yi-Fan ; Cho, An-Thung ; Ni, Wei-Xin ; Kuo, Hao-Chung ; Fang, Chih-Yao ; Huang, Jung Y. ; Pan, C-Ling
Author_Institution :
Nat. Nano Device Labs., Hsinchu
Abstract :
Ultraviolet light was detected by MOS devices with silicon nanocrystals-embedded mesoporous silica sensing layers. The detector reveals high photoresponse of 2.0 (0.3) A/W at wavelength 370 (275) nm, and is blind to green light.
Keywords :
MIS devices; elemental semiconductors; mesoporous materials; nanophotonics; nanoporous materials; photodetectors; silicon; silicon compounds; ultraviolet detectors; MOS devices; Si-SiO2; embedded mesoporous silica sensing layer; photoresponse; silicon nanocrystals; ultraviolet light detection; wavelength 275 nm; wavelength 370 nm; Bonding; MOS devices; Mesoporous materials; Nanocrystals; Nanoporous materials; Nanoscale devices; Nanostructured materials; Optical materials; Photodetectors; Silicon compounds; (040.6040) Silicon detectors; (160.2100) Electro-optical materials;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4628280
