Title :
The patterning of glutaraldehyde-crosslinked gelatin
Author :
Lin, Wei-Chih ; Lung-Jieh Yang
Author_Institution :
Electron. Res. & Service Org., Ind. Technol. Res. Inst., Hsin-Chu, Taiwan
Abstract :
This paper proposes a novel technique for fabricating micro patterns of glutaraldehyde(GA)-crosslinked gelatin. It provides another means to crosslink gelatin other than using the photo-sensitizing agents, and the micro patterns of GA-crosslinked gelatin can still be made successfully by accessing the conventional photolithography. The much less toxic and more biocompatible approaches of strengthening the gelatin microstructures can be developed according to the idea herein. The over-crosslinking or the edge-diffusion phenomena, and the correlated processing issues are also depicted in this paper.
Keywords :
biodiffusion; biomolecular electronics; gelatin; micromechanical devices; molecular biophysics; photolithography; thin films; GA-crosslinked gelatin; MEMS; biocompatible; edge diffusion; gelatin microstructures; glutaraldehyde crosslinked gelatin; micropatterns; photolithography; photosensitizing agents; toxic; Biodegradable materials; Corrugated surfaces; Electronics industry; Fabrication; Industrial electronics; Lithography; Microstructure; Resists; Surface morphology; Surface resistance;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290550