Title :
An AFM-based device for in-situ characterization of nano-wear
Author :
Deladi, S. ; Berenschot, J.W. ; de Boer, M.J. ; Krijnen, G.J.M. ; Elwenspoek, M.C.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g. wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.
Keywords :
atomic force microscopy; micromechanical devices; nanotechnology; surface topography; wear; AFM based device; MEMS; atomic force microscopes; in situ characterization; in situ monitoring; microelectromechanical system; multifunctional cantilever; nanometer scale lateral resolution; nanowear; subnanometer vertical resolution; surface modification; surface topography; Adhesives; Atomic force microscopy; Friction; Instruments; Mechanical factors; Mechanical variables measurement; Nanoscale devices; Probes; Standards development; Surface topography;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290552
