Title :
New concept and fabrication of surface micro machined vertical structure
Author :
Ishizuya, Tohru ; Suzuki, Junji ; Ohuchi, Yusushi ; Konishi, Hiroshi ; Akagawa, Keiichi ; Suzuki, Yoshihiko
Author_Institution :
Nikon Corp., Tokyo, Japan
Abstract :
Technique to pop up a plate vertically using the technique for IC manufacturing process is applicable to various devices in both RF and optical MEMS. This paper introduces novel technique using "Turning-structured Bi-material Beams" for fabrication of a vertical structure and explains success in fabrication of a vertical structure by applying the technique.
Keywords :
integrated circuit manufacture; micromachining; micromechanical devices; IC manufacturing process; RF MEMS; integrated circuit manufacturing; micromechanical devices; optical MEMS; surface micromachined vertical structure fabrication; turning structured bimaterial beams; Artificial intelligence; Magnetic materials; Manufacturing processes; Micromechanical devices; Optical device fabrication; Optical devices; Optical films; Photonic integrated circuits; Substrates; Surface tension;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290564
