Title :
A seat microvalve nozzle for optimal gas flow capacity at large controlled pressure
Author :
Van Der Wijngaart, Wouter ; Thorsén, Anders ; Stemme, Göran
Author_Institution :
Dept. of Signals Sensor & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
Seat microvalves are the most common microvalve type for gas flow control. This paper presents a general method for optimising the flow capacity of a seat valve nozzle and diminishing the requirements on the valve actuator´s stroke-length. Geometrical analysis and finite element (FE) simulations show that for controlling large gas flow at elevated pressure, the optimal nozzle design in terms of flow capacity for a given actuator performance is a multiple-orifice arrangement with miniaturised circular nozzles. Experimental results support the design introduced in this paper.
Keywords :
computational fluid dynamics; finite element analysis; flow control; flow simulation; microactuators; microfluidics; microvalves; nozzles; actuator; circular nozzles; computational fluid dynamics; finite element simulation; gas flow control; multiple orifice arrangement; optimal gas flow capacity; optimal nozzle design; seat microvalve nozzle; stroke length; Analytical models; Finite element methods; Fluid flow; Microvalves; Optimal control; Optimization methods; Performance analysis; Pressure control; Solid modeling; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290565
