• DocumentCode
    2872310
  • Title

    Preparation of microstructured pellistors and their application for fast fuel vapor discrimination

  • Author

    Engel, M. ; Baumbach, M. ; Kammerer, T. ; Schutze, A.

  • Author_Institution
    LMT, Saarlandes Univ., Saarbrucken, Germany
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    268
  • Lastpage
    271
  • Abstract
    Pellistors are well known for the detection of combustible gases. In this paper we present a simple preparation technique for micro pellistors based on a commercially available Si substrate, which is normally used for semiconducting gas sensitive layers. Catalytically active layers are achieved by drop deposition of very low volumes of noble metal containing solutions. Temperature cycling and intelligent signal processing are used to achieve high selectivity. Due to low thermal time constants discrimination between gasoline and diesel fumes is achieved within two seconds, allowing the development of a fuel sensor for integration in fuel nozzles which can prevent filling the car tank with the wrong fuel.
  • Keywords
    chemical vapour deposition; elemental semiconductors; fuel; gas sensors; micromachining; micromechanical devices; nozzles; semiconductor growth; silicon; Si; Si substrate; car tank filling; catalytically active layers; combustible gases detection; diesel fumes; drop deposition; fast fuel vapor discrimination; fuel nozzles; fuel sensor; gasoline; microstructured pellistor; semiconducting gas sensitive layers; signal processing; temperature cycling; thermal time constants discrimination; Filling; Fuels; Gases; Intelligent sensors; Petroleum; Semiconductivity; Signal processing; Substrates; Temperature sensors; Thermal sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
  • Print_ISBN
    0-7803-8265-X
  • Type

    conf

  • DOI
    10.1109/MEMS.2004.1290574
  • Filename
    1290574