DocumentCode
2872310
Title
Preparation of microstructured pellistors and their application for fast fuel vapor discrimination
Author
Engel, M. ; Baumbach, M. ; Kammerer, T. ; Schutze, A.
Author_Institution
LMT, Saarlandes Univ., Saarbrucken, Germany
fYear
2004
fDate
2004
Firstpage
268
Lastpage
271
Abstract
Pellistors are well known for the detection of combustible gases. In this paper we present a simple preparation technique for micro pellistors based on a commercially available Si substrate, which is normally used for semiconducting gas sensitive layers. Catalytically active layers are achieved by drop deposition of very low volumes of noble metal containing solutions. Temperature cycling and intelligent signal processing are used to achieve high selectivity. Due to low thermal time constants discrimination between gasoline and diesel fumes is achieved within two seconds, allowing the development of a fuel sensor for integration in fuel nozzles which can prevent filling the car tank with the wrong fuel.
Keywords
chemical vapour deposition; elemental semiconductors; fuel; gas sensors; micromachining; micromechanical devices; nozzles; semiconductor growth; silicon; Si; Si substrate; car tank filling; catalytically active layers; combustible gases detection; diesel fumes; drop deposition; fast fuel vapor discrimination; fuel nozzles; fuel sensor; gasoline; microstructured pellistor; semiconducting gas sensitive layers; signal processing; temperature cycling; thermal time constants discrimination; Filling; Fuels; Gases; Intelligent sensors; Petroleum; Semiconductivity; Signal processing; Substrates; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290574
Filename
1290574
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