Title :
Tentative of Realization of New Silicon-Integrated Interferometric Microvibration Sensor with Piezoelectric Amplitude Modulation
Keywords :
Acoustic beams; Acoustic waves; Electromagnetic waveguides; Frequency; Optical interferometry; Optical modulation; Optical sensors; Optical waveguides; Silicon; Vibration measurement;
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562311