DocumentCode :
2872424
Title :
Tentative of Realization of New Silicon-Integrated Interferometric Microvibration Sensor with Piezoelectric Amplitude Modulation
fYear :
1996
fDate :
8-13 Sept. 1996
Firstpage :
191
Lastpage :
191
Keywords :
Acoustic beams; Acoustic waves; Electromagnetic waveguides; Frequency; Optical interferometry; Optical modulation; Optical sensors; Optical waveguides; Silicon; Vibration measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
Type :
conf
DOI :
10.1109/CLEOE.1996.562311
Filename :
562311
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2872424
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