Title :
A MEMS Disk Resonator-Based Oscillator
Author :
El Khouly, Moustafa M. ; Nada, Yasseen ; Hegazi, Emad ; Ragai, Hani F. ; Ghannam, Moustafa Y.
Author_Institution :
Dept. of Phys., American Univ. in Cairo, Cairo
Abstract :
A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different specs of the oscillator like frequency, phase noise and frequency stability are investigated. The effect of the presence of the disk resonator on the performance of the oscillator is demonstrated.
Keywords :
VHF oscillators; frequency stability; micromechanical resonators; phase noise; ANSYS; MEMS based oscillator; MEMS disk resonator; PIERCE oscillator; circuit simulations; frequency 60.6 MHz; frequency stability; fully integrated oscillator design; parameter extraction; phase noise; Capacitance; Circuits; Electrodes; Frequency; Micromechanical devices; Oscillators; Parameter extraction; Phase noise; Transducers; Voltage; Disk Resonator; Frequency Stability; MEMS; Phase Noise; Pierce Oscillator;
Conference_Titel :
Microelectronics, 2006. ICM '06. International Conference on
Conference_Location :
Dhahran
Print_ISBN :
1-4244-0764-8
Electronic_ISBN :
1-4244-0765-6
DOI :
10.1109/ICM.2006.373270
