DocumentCode :
2872676
Title :
MEMS AD/DA Converters
Author :
Majid, Amir J.
Author_Institution :
Fac. of Eng., Ajman Univ. of S&T, Ajman
fYear :
2006
fDate :
16-19 Dec. 2006
Firstpage :
135
Lastpage :
137
Abstract :
MEMS analog-to-digital and digital-to-analog converters are proposed using parallel plate electrostatic actuators under bias. Deformable plates supported by springs are used with bias applied voltage which determines the amount of static displacement needed for equilibrium condition. In analog-to-digital arrangement, eight different spring displacements are tapped off the spring corresponding to eight binary decoded voltages. At spring tapped connections, MOS switches are switched on connecting a digital high voltage level at these locations so that when a certain analog voltage is applied on the moving plate of the capacitor, the spring is displaced to one of these locations, enabling different binary voltages to all switches up to that level. The digital binary voltages are fed to an 8-3 priority encoder to obtain the digital value. In digital-to-analog arrangement, the input binary voltage is decoded to different spring locations which correspond to resistances making up a potentiometer circuit for the output analog voltage.
Keywords :
analogue-digital conversion; digital-analogue conversion; electrostatic actuators; microactuators; springs (mechanical); MEMS; MOS switches; analog-to-digital converters; binary decoded voltages; deformable plates; digital binary voltages; digital high voltage level; digital-to-analog converters; parallel plate capacitor; parallel plate electrostatic actuators; potentiometer circuit; springs; static displacement; Decoding; Digital-analog conversion; Electrostatic actuators; Joining processes; MOS capacitors; Micromechanical devices; Potentiometers; Springs; Switches; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics, 2006. ICM '06. International Conference on
Conference_Location :
Dhahran
Print_ISBN :
1-4244-0764-8
Electronic_ISBN :
1-4244-0765-6
Type :
conf
DOI :
10.1109/ICM.2006.373285
Filename :
4243667
Link To Document :
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