Title :
Digital MOS-transistor-based microhotplate array for simultaneous detection of environmentally relevant gases
Author :
Graf, M. ; Taschini, S. ; Kaser, P. ; Hagleitner, C. ; Hierlemann, A. ; Baltes, H.
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
A monolithic gas sensor system is presented, which, for the first time, includes on a single chip an array of three metal-oxide-coated microhotplates with integrated MOS-transistor heaters, as well as specifically designed digital circuitry. An octagonal-shape microhotplate design with MOS-transistor heaters has been adopted for the three gas sensors. The integrated circuitry includes a programmable digital temperature regulation, digital sensor readout units and a standard serial interface. Distinct SnO2-based sensing materials with different noble-metal dopings were tested. First chemical measurements with CO and CH4 have been conducted, the results of which are presented in this paper.
Keywords :
CMOS digital integrated circuits; MOSFET; carbon compounds; chip scale packaging; gas sensors; integrated circuit design; micromechanical devices; organic compounds; semiconductor materials; tin compounds; CO; SnO2; digital MOS transistor based microhotplate array; digital metal oxide semiconductor transistor; digital sensor readout units; environmentally relevant gas detection; integrated MOS transistor heaters; metal doping testing; monolithic gas sensor; octagonal shape microhotplate design; programmable digital temperature regulation; Chemical sensors; Circuit testing; Conducting materials; Doping; Gas detectors; Gases; Integrated circuit measurements; Materials testing; Sensor arrays; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290594
