DocumentCode :
2872762
Title :
Laser microfabrication/manipulation of dielectric materials
Author :
Misawa, Hiroaki ; Juodkazis, Saulius ; Marcinkevicius, A. ; Mizeikis, Vggantas ; Yamaguchi, Akira ; Sun, Hongbo ; Matsuo, Shigeki
Author_Institution :
Tokushima Univ., Japan
fYear :
2000
fDate :
2000
Firstpage :
23
Lastpage :
33
Abstract :
We describe microfabrication of various materials by multiphoton absorption of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within a volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy. This technique can in principle lead to the realization of 3D optical memory and photonic crystals with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed deals with laser micromanipulation using continuous wave laser operating at 1.06 μm. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gels are described
Keywords :
etching; gels; high-speed optical techniques; laser materials processing; light valves; liquid crystals; micro-optics; multiphoton processes; near-field scanning optical microscopy; optical fabrication; optical glass; optical polymers; optical storage; photolithography; photonic band gap; polymerisation; 1.06 micron; 120 to 150 fs; 3D optical memory; 3D prototyping; 3D structures; NSOM lithography; arbitrary lattice; continuous wave laser; dielectric materials; etching; femtosecond light pulses; focal point photomodification; gels; laser manipulation; laser microfabrication; lateral resolution; light driven engine; light-controlled revolution; liquid crystal droplet; multiphoton absorption; optically damaged pattern; photonic crystals; photopolymerisation; polymerizable resins; polymers; self-focusing threshold; silica glass; tightly focused laser beam; volume-phase transition; Absorption; Dielectric materials; Laser transitions; Optical materials; Optical microscopy; Optical polymers; Optical pulses; Photonic crystals; Silicon compounds; Ultrafast optics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micromechatronics and Human Science, 2000. MHS 2000. Proceedings of 2000 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-6498-8
Type :
conf
DOI :
10.1109/MHS.2000.903278
Filename :
903278
Link To Document :
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