Micro SMA actuator and motion control

Author

Kuribayashi, Katsutoshi

Author_Institution

Fac. of Eng., Yamaguchi Univ., Ube, Japan

fYear

2000

fDate

2000

Firstpage

35

Lastpage

42

Abstract

To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed

Keywords

heat treatment; intelligent actuators; microactuators; micromachining; motion control; nickel alloys; shape memory effects; sputter deposition; step response; titanium alloys; TiNi; fabrication methods; heat treatment; linearised mathematical model; micromachining; micromechatronic system; motion control; reversible shape memory effect; shape memory alloy microactuators; size reducibility; sputter deposition; step response; tensile dynamic properties; Actuators; Copper; Fabrication; Heat treatment; Microactuators; Motion control; Shape memory alloys; Sputtering; Substrates; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2000. MHS 2000. Proceedings of 2000 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-6498-8

Type

conf

DOI

10.1109/MHS.2000.903279

Filename

903279