Title :
Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker
Author :
Nakamoto, Takeshi ; Yamaguchi, Katsumi ; Obata, Takayoshi
Author_Institution :
Dept. of Mech. Eng., Nagoya Univ., Japan
Abstract :
Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers
Keywords :
fibre reinforced composites; laser materials processing; moulding; optical polymers; polymerisation; shrinkage; ultraviolet lithography; UV laser irradiation; accuracy improvement; irradiated energy distribution; laser photolithography; manufacturing errors; mask pattern transfer; micro parts production; micro polymer part; photopolymer; shrinkage ratio; unidirectional whisker; Laser beams; Laser theory; Lithography; Manufacturing; Polymers; Rough surfaces; Solid lasers; Solvents; Surface emitting lasers; Surface roughness;
Conference_Titel :
Micromechatronics and Human Science, 2000. MHS 2000. Proceedings of 2000 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-6498-8
DOI :
10.1109/MHS.2000.903287
