Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker

Author

Nakamoto, Takeshi ; Yamaguchi, Katsumi ; Obata, Takayoshi

Author_Institution

Dept. of Mech. Eng., Nagoya Univ., Japan

fYear

2000

fDate

2000

Firstpage

43

Lastpage

48

Abstract

Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers

Keywords

fibre reinforced composites; laser materials processing; moulding; optical polymers; polymerisation; shrinkage; ultraviolet lithography; UV laser irradiation; accuracy improvement; irradiated energy distribution; laser photolithography; manufacturing errors; mask pattern transfer; micro parts production; micro polymer part; photopolymer; shrinkage ratio; unidirectional whisker; Laser beams; Laser theory; Lithography; Manufacturing; Polymers; Rough surfaces; Solid lasers; Solvents; Surface emitting lasers; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2000. MHS 2000. Proceedings of 2000 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-6498-8

Type

conf

DOI

10.1109/MHS.2000.903287

Filename

903287