Title :
Challenges for predictive process simulation in sub 0.1μ silicon devices
Author_Institution :
Stanford University
Keywords :
Circuit simulation; Circuit synthesis; Computational modeling; Design automation; Ion implantation; Manufacturing processes; Predictive models; Semiconductor device modeling; Semiconductor process modeling; Silicon devices;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771096
