Title :
A novel DMTL MEMS phase shifter
Author :
Lou, Jianzhong ; Zhao, Zhenbing ; Ruixia, Yang ; Lu, Miao ; Hu, Xiaodong
Author_Institution :
Hebei Univ. of Technol., Tianjin, China
Abstract :
This paper results for one bit DMTL phase shifter that are designed to operate from 8-32GHz on high resistivity silicon. The periodically loaded capacitor used 4 MEMS bridges that suspended on CPW transmission line. Actuation voltage is applied between bridge and CPW transmission line. The phase shifter result in a insertion loss/return loss is better than -1.0dB/-15dB from 10.5 to 30 GHz and phase shifts of 21.1° at 15 GHz, and 44.3° at 30 GHz.
Keywords :
UHF integrated circuits; coplanar waveguides; micromechanical devices; phase shifters; silicon; transmission lines; 10.5 to 30 GHz; 15 GHz; 8 to 32 GHz; CPW transmission line; DMTL MEMS phase shifter; MEMS bridges; Si; actuation voltage; high resistivity silicon; insertion loss; periodically loaded capacitor; return loss; Bridge circuits; Capacitors; Conductivity; Coplanar waveguides; Insertion loss; Micromechanical devices; Phase shifters; Silicon; Transmission lines; Voltage;
Conference_Titel :
Microwave and Millimeter Wave Technology, 2004. ICMMT 4th International Conference on, Proceedings
Print_ISBN :
0-7803-8401-6
DOI :
10.1109/ICMMT.2004.1411590
