مرکز منطقه ای اطلاع رساني علوم و فناوري - High resolution electron beam nanofabrication

DocumentCode :

2872875

Title :

High resolution electron beam nanofabrication

Author :

Craighead, H.G.

Author_Institution :

Cornell University

fYear :

1994

fDate :

1994

Keywords :

Bonding; Chemicals; Electron beams; Nanofabrication; Nanolithography; Physics; Probes; Resists; Robustness; Self-assembly;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International

Type :

conf

DOI :

10.1109/EDMS.1994.771099

Filename :

771099

Link To Document :