DocumentCode
2873006
Title
Fabrication of directed nano wire networks through self-assembly
Author
Alaca, Erdem ; Sehitoglu, Huseyin ; Saif, Taher
Author_Institution
Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL, USA
fYear
2004
fDate
2004
Firstpage
415
Lastpage
417
Abstract
We present a major development in our novel, self-assembly-based nano wire fabrication method. When it was first reported in MEMS 2003, the method could successfully produce a network of nano wires that are 50 nm in width and hundreds of microns long despite little control on the global shape of the network itself. However, the recent development enables us to impose very complicated shapes on the nano wire network by assigning points of wire initiation and termination by means of simple lithography. Hence, 1) the number, and 2) the direction of nano wires can be dictated.
Keywords
elemental semiconductors; micromechanical devices; nanolithography; nanotechnology; nanowires; self-assembly; silicon; silicon compounds; thin films; 50 nm; MEMS; Si-SiO2; directed nanowire networks; lithography; microelectromechanical system; nanotechnology; self-assembly based nano wire; Etching; Fabrication; Lithography; Micromechanical devices; Self-assembly; Semiconductor films; Shape control; Silicon; Substrates; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290610
Filename
1290610
Link To Document