3D nanorobotic manipulation of nano-order objects inside SEM

3D nanomanipulations of nano-order objects are realized with a 10-DOF nanorobotic manipulator, which is actuated with PZTs and Picomotors and operated inside a SEM. The coarse linear resolutions of the manipulator are better than 30 nm (X, Y, Z stages actuated by Picomotors) and the rotary one 2 mrad, while the resolutions of fine motions (actuated by PZTs) are within nano-order. AFM cantilevers are used as the end-effecters. Several kinds of manipulations are performed with the assistance of dielectrophoresis and van der Waals forces. Pick-and-place of a φ1 μm polystyrene bead shows the effectiveness of dielectrophoresis. To show the manipulation accuracy, several letters are “written” with polystyrene φ3 μm and φ1 μm beads. 3D manipulations of multiwall carbon nanotubes are performed including picking up and bending single ones