Force-deflection characterization of individual carbon nanotubes attached to MEMS devices

Results are presented for in-situ manipulation, attachment, and mechanical testing of individual carbon nanotubes (CNTs) on MEMS devices. Nanotubes positioned onto polysilicon structures were permanently attached by electron beam deposition (EBD) "welding". This approach allows design of mechanical tests for nanotubes with commercially available MEMS processes. A tensile force of 2.4 +/-0.2 μN was applied to the structure via an attached, individual CNT, producing device deflections measured in a scanning electron microscope. Based on atomic force microscopy of welds, the joint between the EBD material and MEMS surface supported a shear stress of 1.6 +/-0.5 MPa.