• DocumentCode
    2873264
  • Title

    Micro-patterned electret for high power electrostatic motor

  • Author

    Genda, I. ; Tanaka, S. ; Esashi, M.

  • Author_Institution
    Dept. of Mech. & Precision Eng., Tohoku Univ., Sendai, Japan
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    470
  • Lastpage
    473
  • Abstract
    This paper describes the charging method of a micro-patterned electret for a high power electrostatic motor. By applying contact electrification using mercury to electret charging, charging to 5 μm-wide micro-patterned electret was achieved. But, 0.9 μm-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 μm thickness was charged up to a charge density of about -100 V/μmSiO2 with fair repeatability.
  • Keywords
    electrets; electrostatic motors; mercury (metal); micromotors; silicon compounds; surface charging; 0.5 micron; 0.9 micron; 5 micron; Hg; SiO2; charge density; charging method; contact electrification; high power electrostatic motor; mercury; micropatterned electret; silicon-dioxide electret; Conducting materials; Electrets; Electrostatics; Induction generators; Insulation; Micromechanical devices; Micromotors; Power generation; Silicon compounds; Surface charging;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
  • Print_ISBN
    0-7803-8265-X
  • Type

    conf

  • DOI
    10.1109/MEMS.2004.1290624
  • Filename
    1290624
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2873264