Title :
Micro electrostrictive actuator with metal compliant electrodes for flow control applications
Author :
Pimpin, Alongkorn ; Suzuki, Yuji ; Kasagi, Nobuhide
Author_Institution :
Dept. of Mech. Eng., Tokyo Univ., Japan
Abstract :
A micro synthetic jet actuator driven by electrostrictive diaphragm actuator was developed for flow control applications. Metal concentric ring electrodes were employed in order to obtain large out-of-plane deformation. It is found that the deformation strongly depends on the gap/width ratio of the ring electrode. The maximum deformation for 2 mm-diameter actuators is as large as 30 μm, which is 3 times larger than that of the plain metal electrode actuator. A prototype synthetic jet actuator was fabricated by using the present electrostrictive actuator, and the jet flow issued from a 0.5 mm orifice was visualized.
Keywords :
deformation; flow control; jets; microactuators; microfluidics; piezoelectric actuators; 0.5 mm; 2 mm; 30 micron; deformation; electrostrictive diaphragm actuator; flow control applications; metal compliant electrodes; microelectrostrictive actuator; microsynthetic jet actuator; plain metal electrode actuator; ring electrode; Dielectric constant; Electrodes; Electrostatic actuators; Electrostriction; Fabrication; Fluid flow control; Mechanical engineering; Micromechanical devices; Orifices; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290626
