• DocumentCode
    2873326
  • Title

    Miniaturized SAW motor with 100 MHz driving frequency

  • Author

    Shigematsu, Tukashi ; Kurosawa, Minoru Kuribayashi

  • Author_Institution
    Tokyo Inst. of Technol., Yokohama, Japan
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    482
  • Lastpage
    485
  • Abstract
    Utilization of high frequency 100 MHz miniaturized a surface acoustic wave (SAW) motor down to 3×12.5×0.5 mm3. To utilize nanometer level amplitude of SAW for friction drive, a 2×2×0.5 mm3 slider that had 25 μm diameter microlens shaped projections on contact surface was introduced. Although the millimeter size small actuator, the miniaturized SAW motor exhibited up to 0.3 m/s high speed and 13 mN high output force over 4.3 mm long stroke. We have recorded highest driving frequency of the SAW motor and also of ultrasonic motors.
  • Keywords
    micromotors; surface acoustic wave devices; ultrasonic motors; 100 MHz; 25 micron; SAW motor; contact surface; friction drive; microlens shaped projections; micromotors; surface acoustic wave motor; ultrasonic motors; Fabrication; Frequency; Friction; Machining; Micromechanical devices; Micromotors; Piezoelectric materials; Stators; Surface acoustic waves; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
  • Print_ISBN
    0-7803-8265-X
  • Type

    conf

  • DOI
    10.1109/MEMS.2004.1290627
  • Filename
    1290627
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2873326