DocumentCode
2873426
Title
Low-voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism
Author
Wang, Kenvin ; Sinclair, M.J. ; Böhringer, Karl F.
Author_Institution
Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA
fYear
2004
fDate
2004
Firstpage
506
Lastpage
509
Abstract
This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4 mtorr).
Keywords
electrostatic actuators; micromirrors; optical scanners; 4 mtorr; bimorph electrostatic actuators; electrostatic mirrors; electrostatic scanning micromirror; floating slider mechanism; mirror angular displacement; Electrostatic actuators; Low voltage; Micromirrors; Mirrors; Residual stresses; Rough surfaces; Springs; Surface roughness; Testing; Thermal force;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290633
Filename
1290633
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