Title :
Low-voltage large angular displacement electrostatic scanning micromirror using floating slider mechanism
Author :
Wang, Kenvin ; Sinclair, M.J. ; Böhringer, Karl F.
Author_Institution :
Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA
Abstract :
This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial tilting angles of the mirrors range between 6.5°-13.5°. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4 mtorr).
Keywords :
electrostatic actuators; micromirrors; optical scanners; 4 mtorr; bimorph electrostatic actuators; electrostatic mirrors; electrostatic scanning micromirror; floating slider mechanism; mirror angular displacement; Electrostatic actuators; Low voltage; Micromirrors; Mirrors; Residual stresses; Rough surfaces; Springs; Surface roughness; Testing; Thermal force;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290633
