Increasing the performance of silicon microphones by the benefit of a complete system simulation

This paper presents a Spice based model of a silicon microphone system. The model considers the acoustical, the mechanical as well as the electrical behaviour. The simulation results are compared with the measurements to focus on the well understood model. Furthermore, a profit of the model is taken by determining the individual noise sources and their contribution to the total noise. Thus it is possible to calculate performance key parameters like sensitivity, noise or signal-to-noise ratio which are subject to special technology parameters. At last, optimizing these parameters will increase the performance.