Title :
High hole mobility transistor (HHMT) with dual Si/Ge0.4Si0.6Si wells structure grown by Si MBE
Author :
Wang, S.J. ; Wu, S.L. ; Chung, H.D. ; Chang, W. ; Wang, K.L.
Author_Institution :
National Cheng Kung University
Keywords :
Boron; Chemicals; Germanium silicon alloys; Laboratories; Length measurement; Molecular beam epitaxial growth; Silicon germanium; Substrates; Temperature; Transconductance;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771136