Title :
Ultra-small single-crystal silicon cantilevers for scanning force microscopes
Author :
Yang, J.L. ; Despont, M. ; Hoogenboom, B.W. ; Drechsler, U. ; Frederix, P.L.T.M. ; Martin, S. ; Hug, H.J. ; Vettiger, P. ; Engel, A.
Author_Institution :
Inst. of Phys., Basel Univ., Switzerland
Abstract :
We have fabricated ultra-small, -fast, and -sensitive single-crystal silicon cantilevers, allowing at least a factor of 10 improvement in sensitivity and a factor of 20-50 enhancement in speed. Two methods allowing a good control of lever length and a miniaturized support chip were developed. These ultra-small cantilevers have excellent mechanical properties and are suitable for use in scanning force microscopes.
Keywords :
atomic force microscopy; micromechanical devices; sensitivity; silicon; Si; mechanical properties; scanning force microscopy; sensitivity; ultrasmall single crystal silicon cantilevers; Force measurement; Force sensors; Magnetic field measurement; Magnetic noise; Microscopy; Physics; Q factor; Resonance; Resonant frequency; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290646
