DocumentCode :
2873669
Title :
An elastomeric tactile sensor employing dielectric constant variation and applicable to orthodontia
Author :
Tseng, Fan-Gang ; Yang, Chih-Sheng ; Pan, Li-Chern
Author_Institution :
EES Dept., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2004
fDate :
2004
Firstpage :
564
Lastpage :
567
Abstract :
This paper introduces a capacitive-type elastomeric tactile sensor for the application of orthodontia. Different from many capacitive-type tactile sensors employing gap-distance or electrode-overlap changing for pressure or shear signal measurement, this sensor applies electrostriction effect (dielectric constant change due to dielectric particles distance variation) for signal detection, thus allows electrodes placed on the same plane for orthodontia application. Biocompatible silicon rubber is used as the buffer layer to sustain large force. By particle distance variation increasing the equivalent particle concentration, this sensor can reach a sensitivity of 0.269 nF/Mpa with a free load capacitance of 18 pF, comparable to those from other type capacitive tactile sensors. Fabrication and simulation has been successfully carried out for comparison.
Keywords :
biosensors; capacitive sensors; dentistry; electrostriction; force measurement; orthotics; permittivity; rubber; silicon; tactile sensors; 18 PF; biocompatible silicon rubber; capacitive sensor; dielectric constant; dielectric particles; elastomeric tactile sensor; electrode overlap; electrostriction effect; orthodontia; particle concentration; sensitivity; shear signal measurement; signal detection; Biosensors; Capacitive sensors; Dielectric constant; Dielectric measurements; Electrodes; Electrostriction; Particle measurements; Pressure measurement; Signal detection; Tactile sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
Type :
conf
DOI :
10.1109/MEMS.2004.1290647
Filename :
1290647
Link To Document :
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