Title :
Uncooled all-parylene bolometer
Author :
Liger, Mathieu ; Konishi, Saioshi ; Tai, Yu-Chong
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
Abstract :
This paper presents an uncooled, room-temperature, all-parylene bolometer. The device is made of two layers of pyrolyzed (or "carbonized") parylene and a metal layer for interconnections. We demonstrated that high responsivity can be achieved by tailoring the electrical conductivity and the temperature coefficient of resistance (TCR) using different pyrolysis conditions for each parylene layer.
Keywords :
bolometers; electric resistance; electrical conductivity; polymer films; pyrolysis; electrical conductivity; pyrolysis; temperature coefficient of resistance; uncooled all-parylene bolometer; Amorphous silicon; Bolometers; Conducting materials; Electric resistance; Electrical resistance measurement; Leg; Temperature dependence; Temperature sensors; Thermal conductivity; Thermal resistance;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290654
