• DocumentCode
    2874064
  • Title

    High pressure field oxidation for advanced poly-buffered locos isolation process

  • Author

    Kim, Sang S. ; Deleonibus, Simon

  • Author_Institution
    LETI
  • fYear
    1994
  • fDate
    1994
  • Firstpage
    45419
  • Lastpage
    46514
  • Keywords
    Isolation technology; Kinetic theory; Oxidation; Performance analysis; Space technology; Temperature distribution; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.771217
  • Filename
    771217
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2874064