Title :
High pressure field oxidation for advanced poly-buffered locos isolation process
Author :
Kim, Sang S. ; Deleonibus, Simon
Author_Institution :
LETI
Keywords :
Isolation technology; Kinetic theory; Oxidation; Performance analysis; Space technology; Temperature distribution; Ultra large scale integration;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771217
