DocumentCode
2874091
Title
Micro-hotplate for thin film gas sensor: fabrication using cmos technology
Author
Fung, Samuel K H ; Chan, Philip C.H. ; Sin, Johnny K O ; Cheung, Peter W.
Author_Institution
Hong Kong University of Science and Technology
fYear
1994
fDate
1994
Firstpage
37043
Lastpage
38139
Keywords
Aluminum; CMOS technology; Etching; Fabrication; Gas detectors; Silicon; Temperature sensors; Thermal conductivity; Thermal resistance; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771219
Filename
771219
Link To Document