Title :
Neural network based modeling for the growth rate of ZnO thin films on the pulsed laser deposition
Author :
Ko, Young-Don ; Kang, Hong Seong ; Jeong, Min-Chang ; Lee, Sang Yeol ; Myoung, Jae-min ; Yun, Ilgu
Author_Institution :
Dept. of Electr. & Electron. Eng., Yonsei Univ., Seoul, South Korea
Abstract :
In this study the D-optimal design was used to make design matrix in this experiment. Neural networks (NNets) based on the backpropagation (BP) algorithm are applied to the pulsed laser deposition (PLD) process modeling in order to construct the model for the growth rate of the ZnO thin films.
Keywords :
backpropagation; pulsed laser deposition; semiconductor process modelling; semiconductor thin films; wide band gap semiconductors; zinc compounds; ZnO; backpropagation algorithm; design matrix; neural networks; pulsed laser deposition process modeling; thin films growth rate; Design engineering; Laser modes; Neural networks; Optical design; Optical pulses; Pulsed laser deposition; Pump lasers; Response surface methodology; Sputtering; Zinc oxide;
Conference_Titel :
Future of Electron Devices, 2004. International Meeting for
Print_ISBN :
0-7803-8423-7
Electronic_ISBN :
0-7803-8424-5
DOI :
10.1109/IMFEDK.2004.1566417
