DocumentCode
2874104
Title
Neural network based modeling for the growth rate of ZnO thin films on the pulsed laser deposition
Author
Ko, Young-Don ; Kang, Hong Seong ; Jeong, Min-Chang ; Lee, Sang Yeol ; Myoung, Jae-min ; Yun, Ilgu
Author_Institution
Dept. of Electr. & Electron. Eng., Yonsei Univ., Seoul, South Korea
fYear
2004
fDate
26-28 July 2004
Firstpage
79
Lastpage
80
Abstract
In this study the D-optimal design was used to make design matrix in this experiment. Neural networks (NNets) based on the backpropagation (BP) algorithm are applied to the pulsed laser deposition (PLD) process modeling in order to construct the model for the growth rate of the ZnO thin films.
Keywords
backpropagation; pulsed laser deposition; semiconductor process modelling; semiconductor thin films; wide band gap semiconductors; zinc compounds; ZnO; backpropagation algorithm; design matrix; neural networks; pulsed laser deposition process modeling; thin films growth rate; Design engineering; Laser modes; Neural networks; Optical design; Optical pulses; Pulsed laser deposition; Pump lasers; Response surface methodology; Sputtering; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Future of Electron Devices, 2004. International Meeting for
Print_ISBN
0-7803-8423-7
Electronic_ISBN
0-7803-8424-5
Type
conf
DOI
10.1109/IMFEDK.2004.1566417
Filename
1566417
Link To Document