DocumentCode
2874142
Title
The study of silicon pressure sensors fabrication
Author
Chang, Chung-Cheng ; Liu, Chi-Tsai ; Hsich, Mei-Kuan
Author_Institution
National Taiwan Ocean University
fYear
1994
fDate
1994
Firstpage
38505
Lastpage
39601
Keywords
Bridge circuits; Etching; Fabrication; Ocean temperature; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771220
Filename
771220
Link To Document