2874408

Flexible Fabs

Hannon, Cy

LSI Logic Corporation

1993

20-21 Sept. 1993

Application specific integrated circuits; Computer integrated manufacturing; Etching; Flexible manufacturing systems; Large scale integration; Logic; Manufacturing automation; Plasma applications; Plasma materials processing; Semiconductor device manufacture;

English

ieee

Semiconductor Manufacturing, 1993. International Symposium on

Austin, TX, USA

conf

10.1109/ISSM.1993.671081

671081