• DocumentCode
    2874441
  • Title

    Asuka Project - mission and status

  • Author

    Endo, Nobuhiro

  • Author_Institution
    Semicond. Leading Edge Technol., Inc., Japan
  • fYear
    2004
  • fDate
    26-28 July 2004
  • Firstpage
    119
  • Lastpage
    120
  • Abstract
    An SoC device necessitating low power features has been increasingly significant for the coming information network society. On the other hand, the higher technology barrier (red brick wall in IRTS) has resulted in enormous R&D investment, so that the Japanese semiconductor manufacturers may collaborate with pre-competitive R&D tasks for the advanced SoC devices. On the basis of this background, this paper reports on development of the 65 nm node device process technologies in the ASUKA Project.
  • Keywords
    integrated circuit manufacture; low-power electronics; nanotechnology; research and development; system-on-chip; 65 nm; Asuka Project; Japanese semiconductor manufacturers; R&D; advanced SoC devices; device process technologies; low power features; technology barrier; Dielectric materials; Electron optics; High K dielectric materials; High-K gate dielectrics; Lithography; Optical films; Optical interconnections; Optical materials; Research and development; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Future of Electron Devices, 2004. International Meeting for
  • Print_ISBN
    0-7803-8423-7
  • Electronic_ISBN
    0-7803-8424-5
  • Type

    conf

  • DOI
    10.1109/IMFEDK.2004.1566437
  • Filename
    1566437