Title :
The performance and reliability of self-induced lightly-doped-drain polysilicon thin film transistors
Author :
Yeh, Ching-Fa ; Chen, Tai-Ju ; Yang, Tzung-Zu
Author_Institution :
National Chiao Tung University
Keywords :
Active matrix liquid crystal displays; Hydrogen; Insulation; Leakage current; Passivation; Plasma immersion ion implantation; Silicon; Stress; Thin film transistors; Voltage;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771272
