Title :
RF MEMS tunable capacitors with large tuning ratio
Author :
Rijks, Th.G.S.M. ; van Beek, J.T.M. ; Steeneken, P.G. ; Ulenaers, M.J.E. ; De Coster, J. ; Puers, R.
Author_Institution :
Philips Res., Eindhoven, Netherlands
Abstract :
MEMS tunable capacitors have been fabricated in a thin-film technology for passive integration. Using a dual-gap relay-type design, continuous and reversible capacitance tuning with a tuning ratio up to 17 has been demonstrated, while requiring an actuation voltage of only 20 V. A quality factor of 150 to 500 has been measured in the frequency range of 1 to 6 GHz, making these devices very suitable as building blocks in many RF applications. These are the highest tuning ratio and quality factor reported to date for parallel-plate tunable capacitors.
Keywords :
Q-factor; capacitors; electrostatic actuators; microrelays; tuning; 1 to 6 GHz; 20 V; RF MEMS tunable capacitors; dual gap relay type design; parallel plate tunable capacitors; passive integration; quality factor; radiofrequency microelectromechanical system tunable capacitors; reversible capacitance tuning; thin film technology; tuning ratio; Capacitance measurement; Capacitors; Frequency measurement; Micromechanical devices; Q factor; Radiofrequency microelectromechanical systems; Relays; Transistors; Tuning; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290700
