Title :
Tunable solenoid microinductors utilizing Permalloy electro-thermal vibromotors
Author :
Shih, W.-P. ; Li, Z. ; McCormick, D.T. ; Tien, N.C. ; Hui, C.Y.
Author_Institution :
Cornell Univ., Ithaca, NY, USA
Abstract :
This paper presents a first-of-its-kind micromachined tunable solenoid microinductor with tuning ratio as high as 18:1 at 10 kHz. A tuning mechanism using a permalloy linear vibromotor enables low power consumption, low driving voltage (less than 1 volt), and long travel distance. A low temperature batch process is developed to integrate the microinductor structure and vibromotor. The measured inductance is on the order of 10 nH and rolls off at 1MHz. Potential applications include performance optimization and functionality enhancement to magnetic microsensors and micromagnetic power devices, such as dc/dc converter.
Keywords :
DC-DC power convertors; Permalloy; ferromagnetic materials; inductance; low-power electronics; magnetic sensors; micromagnetics; microsensors; power consumption; power inductors; solenoids; 1 MHz; 10 kHz; FeNi; dc/dc converter; electrothermal vibromotors; inductance; linear vibromotor; low driving voltage; low power consumption; magnetic microsensors; micromachined tunable solenoid microinductor; micromagnetic power devices; tuning ratio; Actuators; Fabrication; Inductance; Inductors; Magnetic cores; Micromagnetics; Solenoids; Temperature; Tunable circuits and devices; Tuning;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290704
