Tunable solenoid microinductors utilizing Permalloy electro-thermal vibromotors

Author

Shih, W.-P. ; Li, Z. ; McCormick, D.T. ; Tien, N.C. ; Hui, C.Y.

Author_Institution

Cornell Univ., Ithaca, NY, USA

fYear

2004

fDate

2004

Firstpage

793

Lastpage

796

Abstract

This paper presents a first-of-its-kind micromachined tunable solenoid microinductor with tuning ratio as high as 18:1 at 10 kHz. A tuning mechanism using a permalloy linear vibromotor enables low power consumption, low driving voltage (less than 1 volt), and long travel distance. A low temperature batch process is developed to integrate the microinductor structure and vibromotor. The measured inductance is on the order of 10 nH and rolls off at 1MHz. Potential applications include performance optimization and functionality enhancement to magnetic microsensors and micromagnetic power devices, such as dc/dc converter.

Keywords

DC-DC power convertors; Permalloy; ferromagnetic materials; inductance; low-power electronics; magnetic sensors; micromagnetics; microsensors; power consumption; power inductors; solenoids; 1 MHz; 10 kHz; FeNi; dc/dc converter; electrothermal vibromotors; inductance; linear vibromotor; low driving voltage; low power consumption; magnetic microsensors; micromachined tunable solenoid microinductor; micromagnetic power devices; tuning ratio; Actuators; Fabrication; Inductance; Inductors; Magnetic cores; Micromagnetics; Solenoids; Temperature; Tunable circuits and devices; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Print_ISBN

0-7803-8265-X

Type

conf

DOI

10.1109/MEMS.2004.1290704

Filename

1290704