DocumentCode
2874678
Title
The effect of doping profile variations upon deep submicrometer MOSFET´s
Author
Brews, J.R.
Author_Institution
The University of Arizona
fYear
1994
fDate
1994
Firstpage
37135
Lastpage
38231
Keywords
Current-voltage characteristics; Doping profiles; Medical simulation; Numerical simulation; Poisson equations; Semiconductor process modeling; Threshold voltage; Uncertainty;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771277
Filename
771277
Link To Document