Title :
Characterization of deep submicron pattern and quantum dots using atomic force microscope(AFM)
Author :
Shy, S.L. ; Liu, D.C. ; Lee, S.H. ; Lei, T.F. ; Lee, C.P. ; Loong, W.A.
Author_Institution :
National Chiao Tung University
Keywords :
Atomic force microscopy; Chromium; Etching; Gallium arsenide; Inspection; Metrology; Quantum dots; Scanning electron microscopy; Substrates; Surface charging;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771281
