DocumentCode
2874787
Title
Characterization of deep submicron pattern and quantum dots using atomic force microscope(AFM)
Author
Shy, S.L. ; Liu, D.C. ; Lee, S.H. ; Lei, T.F. ; Lee, C.P. ; Loong, W.A.
Author_Institution
National Chiao Tung University
fYear
1994
fDate
1994
Firstpage
43348
Lastpage
44809
Keywords
Atomic force microscopy; Chromium; Etching; Gallium arsenide; Inspection; Metrology; Quantum dots; Scanning electron microscopy; Substrates; Surface charging;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771281
Filename
771281
Link To Document