Title :
A Novel MEMS Based Infrared Biosensor for Ultra-Sensitive Detection of Waterborne Pathogens
Author :
Zhang, Lei ; Dong, Tao ; Yang, Zhaochu ; Zhao, Xinyan ; Høivik, Nils ; Yamamoto, Y. ; Wenger, Ch. ; Tillack, B.
Abstract :
In this paper, a new concept of MEMS based biosensor is presented as a promising solution for the ultra- low level and real time detection of waterborne pathogens. This novel infrared biosensor employs the SiGe/Si quantum well thermistor with a high TCR and low 1/f noise to achieve a high sensitive detection through its resistance change with the absorption of infrared radiation from the dark quencher. Meanwhile, a manufacturing process applying the adhesive wafer bonding is proposed.
Conference_Titel :
Remote Sensing, Environment and Transportation Engineering (RSETE), 2012 2nd International Conference on
Conference_Location :
Nanjing, Jiangsu, China
Print_ISBN :
978-1-4673-0872-4
DOI :
10.1109/RSETE.2012.6260364
