DocumentCode
2874939
Title
Laterally moving bi-stable MEMS DC-switch for biomedical applications
Author
Receveur, R.A.M. ; Marxer, C. ; Duport, F. ; Woering, R. ; Larik, V. ; de Rooij, N.F.
Author_Institution
Medtronic Bakken Res. Center, Maastricht, Netherlands
fYear
2004
fDate
2004
Firstpage
854
Lastpage
856
Abstract
We have designed a bi-stable micro electro mechanical switch for an implantable lead electrode multiplexer application. It is easy to fabricate using only one mask. Applying an 18 V pulse to the actuators induces state changes. Total size of the structure is approximately 1.5 mm×1.5 mm. The contact resistance stays consistently below 30 Ohm for the first 40000 cycles.
Keywords
biomedical electrodes; contact resistance; gold alloys; lead; microactuators; microelectrodes; microswitches; nickel alloys; 18 V; biomedical applications; bistable MEMS dc switch; lead electrode multiplexer application; microactuators; microelectromechanical system; Actuators; Biomedical electrodes; Connectors; Contact resistance; Fasteners; Micromechanical devices; Optical switches; Pulse generation; Springs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN
0-7803-8265-X
Type
conf
DOI
10.1109/MEMS.2004.1290721
Filename
1290721
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