Title :
Laterally moving bi-stable MEMS DC-switch for biomedical applications
Author :
Receveur, R.A.M. ; Marxer, C. ; Duport, F. ; Woering, R. ; Larik, V. ; de Rooij, N.F.
Author_Institution :
Medtronic Bakken Res. Center, Maastricht, Netherlands
Abstract :
We have designed a bi-stable micro electro mechanical switch for an implantable lead electrode multiplexer application. It is easy to fabricate using only one mask. Applying an 18 V pulse to the actuators induces state changes. Total size of the structure is approximately 1.5 mm×1.5 mm. The contact resistance stays consistently below 30 Ohm for the first 40000 cycles.
Keywords :
biomedical electrodes; contact resistance; gold alloys; lead; microactuators; microelectrodes; microswitches; nickel alloys; 18 V; biomedical applications; bistable MEMS dc switch; lead electrode multiplexer application; microactuators; microelectromechanical system; Actuators; Biomedical electrodes; Connectors; Contact resistance; Fasteners; Micromechanical devices; Optical switches; Pulse generation; Springs; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290721
