Title :
Matrix combination of MEMS relays
Author :
Fabian, J.-H. ; Niayesh, Kaveh ; Kotilainen, S. ; Wapelhorst, E. ; Niemeyer, L. ; Strümpler, R.
Author_Institution :
Corp. Res., ABB Switzerland Ltd., Baden, Switzerland
Abstract :
This paper reports the feasibility of parallel-series (matrix) combination of micro relays to extend their electrical power handling and current interruption capabilities. Conditions for a stable operation of a micro switch matrix are derived and the performance features of an elementary MEMS switch for matrix operation are specified.
Keywords :
microrelays; MEMS relays; current interruption capabilities; electrical power handling; matrix combination; microelectromechanical system; Actuators; Automatic control; Contacts; Electrostatics; Micromechanical devices; Microrelays; Microswitches; Relays; Size control; Switches;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290723
