• DocumentCode
    2874974
  • Title

    Matrix combination of MEMS relays

  • Author

    Fabian, J.-H. ; Niayesh, Kaveh ; Kotilainen, S. ; Wapelhorst, E. ; Niemeyer, L. ; Strümpler, R.

  • Author_Institution
    Corp. Res., ABB Switzerland Ltd., Baden, Switzerland
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    861
  • Lastpage
    864
  • Abstract
    This paper reports the feasibility of parallel-series (matrix) combination of micro relays to extend their electrical power handling and current interruption capabilities. Conditions for a stable operation of a micro switch matrix are derived and the performance features of an elementary MEMS switch for matrix operation are specified.
  • Keywords
    microrelays; MEMS relays; current interruption capabilities; electrical power handling; matrix combination; microelectromechanical system; Actuators; Automatic control; Contacts; Electrostatics; Micromechanical devices; Microrelays; Microswitches; Relays; Size control; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
  • Print_ISBN
    0-7803-8265-X
  • Type

    conf

  • DOI
    10.1109/MEMS.2004.1290723
  • Filename
    1290723
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2874974