Title :
Fabrication and characterization of LPE-grown, erbium-doped InGaAs PIN photodiodes
Author :
Ho, Wen-Jeng ; Tu, Yuan-Kuang ; Lin, Wei ; Shih, Hung-Hui ; Dai, Ting-Am ; Wu, Meng-Chyi
Author_Institution :
National Tsing Hua University
Keywords :
Chemical elements; Epitaxial growth; Erbium; Fabrication; Gettering; Impurities; Indium gallium arsenide; Indium phosphide; Luminescence; PIN photodiodes;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771302
