• DocumentCode
    2875182
  • Title

    Gas source MBE growth of InP under In-rich conditions

  • Author

    Lee, Tsuen-Lin ; Liu, Jin-Shang ; Lin, Hao-Hsiung

  • Author_Institution
    National Taiwan University
  • fYear
    1994
  • fDate
    1994
  • Firstpage
    14558
  • Lastpage
    15654
  • Keywords
    Atom optics; Atomic layer deposition; Epitaxial growth; Indium phosphide; Molecular beam epitaxial growth; Optical surface waves; Rough surfaces; Substrates; Surface morphology; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.771304
  • Filename
    771304
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2875182