Title :
Gas source MBE growth of InP under In-rich conditions
Author :
Lee, Tsuen-Lin ; Liu, Jin-Shang ; Lin, Hao-Hsiung
Author_Institution :
National Taiwan University
Keywords :
Atom optics; Atomic layer deposition; Epitaxial growth; Indium phosphide; Molecular beam epitaxial growth; Optical surface waves; Rough surfaces; Substrates; Surface morphology; Surface roughness;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771304
